Large language models (LLMs) have shown promise in robotic procedural planning, yet their human-centric reasoning often omits the low-level, grounded details needed for robotic execution. Vision-language models (VLMs) offer a path toward more perceptually grounded plans, but current methods either rely on expensive, large-scale models or are constrained to narrow simulation settings. We introduce SelfReVision, a lightweight and scalable self-improvement framework for vision-language procedural planning. SelfReVision enables small VLMs to iteratively critique, revise, and verify their own plans, without external supervision or teacher models, drawing inspiration from chain-of-thought prompting and self-instruct paradigms. Through this self-distillation loop, models generate higher-quality, execution-ready plans that can be used both at inference and for continued fine-tuning. Using models varying from 3B to 72B, our results show that SelfReVision not only boosts performance over weak base VLMs but also outperforms models 100X the size, yielding improved control in downstream embodied tasks.