Business process modeling has traditionally depended on manual efforts or rigid rule-based techniques, limiting scalability and flexibility. Recent progress in Large Language Models (LLMs) enables automatic generation of process models from text, yet a systematic evaluation remains lacking. This paper explores the ability of LLMs to produce structurally and semantically valid business process workflows using five approaches: zero-shot, zero-shot CoT, few-shot, few-shot CoT, and fine-tuning. We assess performance under increasing control-flow complexity (e.g., nested gateways, parallel branches) using the MaD dataset, and introduce a masked-input setting to test semantic robustness. Results show that while fine-tuning achieves the best accuracy, few-shot CoT excels in handling complex logic and incomplete inputs. These findings reveal the strengths and limits of LLMs in process modeling and offer practical guidance for enterprise Business Process Management (BPM) automation.