Instruction-following is a foundational capability of large language models (LLMs), with its improvement hinging on scalable and accurate feedback from judge models. However, the reliability of current judge models in instruction-following remains underexplored due to several deficiencies of existing meta-evaluation benchmarks, such as their insufficient data coverage and oversimplified pairwise evaluation paradigms that misalign with model optimization scenarios. To this end, we propose IF-RewardBench, a comprehensive meta-evaluation benchmark for instruction-following that covers diverse instruction and constraint types. For each instruction, we construct a preference graph containing all pairwise preferences among multiple responses based on instruction-following quality. This design enables a listwise evaluation paradigm that assesses the capabilities of judge models to rank multiple responses, which is essential in guiding model alignment. Extensive experiments on IF-RewardBench reveal significant deficiencies in current judge models and demonstrate that our benchmark achieves a stronger positive correlation with downstream task performance compared to existing benchmarks. Our codes and data are available at https://github.com/thu-coai/IF-RewardBench.

Instruction-following is a fundamental ability of Large Language Models (LLMs), requiring their generated outputs to follow multiple constraints imposed in input instructions. Numerous studies have attempted to enhance this ability through preference optimization or reinforcement learning based on reward signals from LLM-as-a-Judge. However, existing evaluation models for instruction-following still possess many deficiencies, such as substantial costs and unreliable assessments. To this end, we propose IF-CRITIC, an LLM critic for fine-grained, efficient, and reliable instruction-following evaluation. We first develop a checklist generator to decompose instructions and generate constraint checklists. With the assistance of the checklists, we collect high-quality critique training data through a multi-stage critique filtering mechanism and employ a constraint-level preference optimization method to train IF-CRITIC. Extensive experiments show that the evaluation performance of IF-CRITIC can beat strong LLM-as-a-Judge baselines, including o4-mini and Gemini-3-Pro. With the reward signals provided by IF-CRITIC, LLMs can achieve substantial performance gains in instruction-following optimization under lowercomputational overhead compared to strong LLM critic baselines. Our code and model are available at https://github.com/thu-coai/IF-CRITIC.