Large Language Models (LLMs) have advanced reasoning ability, yet conventional alignment remains dominated by outcome reward models (ORMs) that judge only final answers. Process Reward Models(PRMs) address this gap by evaluating and guiding reasoning at the step or trajectory level. This survey provides a systematic overview of PRMs through the full loop: how to generate process data, build PRMs, and use PRMs for test-time scaling and reinforcement learning. We summarize applications across math, code, text, multimodal reasoning, robotics, and agents, and review emerging benchmarks. Our goal is to clarify design spaces, reveal open challenges, and guide future research toward fine-grained, robust reasoning alignment.

Augmenting Large Language Models (LLMs) with external tools enables them to execute complex, multi-step tasks. However, tool learning is hampered by the static synthetic data pipelines, where data generation and model training are executed as two separate, non-interactive processes. This approach fails to focus on the model’s specific weaknesses adaptively and allows noisy labels to persist, degrading training efficiency. We introduce LoopTool, a fully automated, model-aware data evolution framework that closes this loop by tightly integrating data synthesis and model training. LoopTool iteratively evolves both the data and the model through three synergistic modules: (1) Greedy Capability Probing (GCP) diagnoses the model’s mastered and failed capabilities; (2) Judgement-Guided Label Verification (JGLV) uses an open-source judge model to find and correct annotation errors, progressively purifying the dataset; and (3) Error-Driven Data Expansion (EDDE) generates new, challenging samples based on identified failures. This closed-loop process is tightly integrated with reinforcement learning training and operates within a cost-efficient, open-source ecosystem, thereby eliminating reliance on costly APIs. Experiments show that LoopTool-8B significantly surpasses its 32B data generator and achieves new state-of-the-art results on the BFCL-v3 and ACEBench benchmarks for its scale. Our work demonstrates that closed-loop, self-refining data pipelines can dramatically enhance the tool-use capabilities of LLMs.